Sputtering PVD Systems

The magnetron sputtering systems of eifeler-Vacotec are designed for depositing adhesion-secure and slide-favorable coatings on the basis of MoS2 or DLC.

These sputtering PVD coatings are mostly applied for moving parts or tools in order to improve the slide characteristics on the surface. Friction coefficients < 0.1 in contact with steel are easily achieved.

Magnetron sputtering systems:

  • alpha 400C
  • alpha 1000C

Our PVD sputtering systems are characterized by the following properties:

  • Strong high-vacuum pumps and cold traps for short process times
  • Cryo pumps
  • Coatings possible at < 200°C
  • Pulsed bias power source
  • Control of process gases individually
  • Heating
  • Target shutter.

As with all PVD systems, these units also offer the user-friendly and intuitive software AlphaControl.
Regardless of whether it involves a sputter or an arc system, the user software is structured identically.

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